When the compressed air enters the air bearing through the orifice (or the throttling groove) to form a pressure film, and the respective components are supported to achieve frictionless motion with respect to the respective rails, the disc spring in the preload air bearing is received from The axial load under the action of the pressure film, so that the cone bottom angle H of the disc spring section is reduced, the disc spring generates an axial deformation K, and its axial dimension H becomes HK, thereby generating elastic energy and air flotation pressure. The dynamic balance ensures that the air film thickness between the air bearing and the surface of each guide rail is K/2, which ensures the rigidity of each rigid body during the dynamic measurement of the coordinate measuring machine, so as to achieve accurate correction of the positioning error and improve The accuracy of the indication. When the disc spring does not correctly generate the axial deformation K, the pressure film forces the rigid body of the coordinate measuring machine to generate a rigid deformation between the air bearing and the normal direction of the moving rail, which cannot be guaranteed in the measurement process. The film thickness and the coordinate measuring machine perform dynamic measurement under the condition that the rigidity of the rigid body is damaged, which can not guarantee the accurate correction of the positioning error, let alone the accuracy and repeatability of the indication value.
When the pre-loaded disc spring cannot correctly generate the axial deformation K, the positioning error correction is performed on the coordinate measuring machine measurement reference (metal grating scale) by the Doppler laser, and the positioning error correction graph drawn by the measured data, wherein the abscissa It indicates the coordinate value of the coordinate measuring machine along the X axis every 50mm, and the ordinate indicates the correction reference correction error value corresponding to it. The deviation curve of the X-axis measurement reference from the horizontal coordinate of 450mm to the coordinate origin every 50mm is a deviation from the indication value of the laser from the right to the left.
The measurement and equipment measurement technology is based on the calculated X-axis coordinate origin to the forward 450mm, the X-axis measurement reference (metal scale) is a cumulative error of the positioning error every 50mm, and the ordinate measurement of the reference positioning error correction value data Calculation.
The interval range 00 of the X-axis is shown as the deviation from the X-axis coordinate origin to the forward 450 mm when the axis measurement reference (metal scale) is a distance from the left to the right and the laser indication value every 50 mm. It can be seen from the graph that the measurement backhaul error of the measurement reference is very large (24Lm or 1817Lm), which is an abnormal state, and the correction value of the ordinate measurement reference positioning error is also very different. The measuring machine in this state The positioning error is difficult to correct, and the indication error is also relatively large. The indication error of the axial length measurement of the same nominal size between the X, Y and Z axes is between 01010102 mm.
Then, in addition to ensuring the correct installation and commissioning of other aspects of the coordinate measuring machine (such as ensuring the rigidity of the various connecting parts of the system, the hysteresis of the system, etc.), the method for solving the above problems must also fundamentally strictly enforce the preloaded disc springs. Design, and ensure its own manufacturing precision and assembly rationality, such as the same degree of internal bore and outer circle requirements, the parallelism requirements of the two working faces, the material properties and the hardness after heat treatment, etc., the assembly process must be sufficient To ensure good contact with the relevant parts, it must be able to function properly, and it is not allowed to use a curable adhesive to bond it with the relevant parts for easy installation, so that it does not work or does not work at all. It is best to use a wide-temperature aviation grease (commonly known as lanolin) to bond it to the relevant parts, making it easy to install without damaging its own function.
After re-replacement of the excellent preloaded disc spring during the commissioning process and reasonable assembly, the correction curve of the X-axis positioning error of the coordinate measuring machine, the deviation of the 450mm indication value of the measurement reference (metal scale) from the laser indication value is only 9Lm, its backhaul error is guaranteed within 2Lm, and the indication error of the corrected length measurement also meets the requirements of the relevant verification procedures. Practice shows that the same size of each of the X, Y, Z axes shows a difference of no more than 4Lm. It can be seen that the pre-loaded disc springs are strictly and properly designed, the process is correctly arranged, and the assembly is used reasonably. Coordinate measuring machine indication accuracy has a crucial impact.
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